Dab tsi yog qhov txawv ntawm Ultra High Purity Gas Regulator Valve vs Ultra High Purity Diaphragm Valves

Introduction

Nyob rau hauv lub cheeb tsam ntawm high-tech industries xws li semiconductor manufacturing, tshuaj ntau lawm, thiab analytical instrumentation, tuav ntawm ultra siab purity (UHP) gases yog qhov tseem ceeb. Cov pa roj no, feem ntau suav nrog nitrogen, oxygen, hydrogen, thiab cov khoom sib xyaw tshwj xeeb, yuav tsum tau xa nrog cov kab mob me me kom ntseeg tau cov txheej txheem kev ncaj ncees thiab cov khoom zoo. Ob qhov tseem ceeb hauv UHP roj tshuab yog UHP roj regulator li qub thiab UHP diaphragm li qub. Thaum ob qho tib si tsim los tswj cov purity ntawm gases nyob rau theem siab tshaj 99.9999% (rau cuaj purity), lawv ua hauj lwm txawv thiab feature tshwj xeeb tsim raws li cov kev xav tau kev ua hauj lwm.

UHP gas regulator valve feem ntau yog lub luag haujlwm rau kev tswj thiab txo qhov siab ntawm cov pa roj nkag los ntawm cov khoom siv siab, xws li lub tog raj kheej lossis cov khoom ntim ntau, kom ruaj khov, qis qis tsim nyog rau cov txheej txheem hauv qab. Nyob rau hauv sib piv, UHP diaphragm valve ua raws li ib tug on-off los yog throttling ntaus ntawv, cais cov roj ntws thaum tiv thaiv kom txhob muaj kab mob los ntawm lwm qhov chaw los yog sab hauv Cheebtsam. Kev nkag siab qhov sib txawv ntawm ob hom li qub no yog qhov tseem ceeb rau cov kws tsim khoom, cov kws tshaj lij, thiab cov neeg tsim qauv los xaiv cov cuab yeej tsim nyog rau lawv daim ntawv thov.

Kab lus no delves mus rau hauv cov txheej txheem ntawm ob lub li qub, tshawb nrhiav lawv cov qauv tsim, cov khoom siv, cov qauv kev ua haujlwm, qhov zoo, kev txwv, thiab qhov sib txawv tseem ceeb. Los ntawm kev tshuaj xyuas cov ntsiab lus no, peb lub hom phiaj los muab cov lus qhia dav dav uas qhia txog yuav ua li cas txhua lub valve txhawb nqa kev tswj hwm ultra siab purity hauv cov pa xa hluav taws xob. Kev sib tham yuav hais txog qhov tseem ceeb ntawm kev huv huv hauv kev lag luam tseem ceeb thiab yuav ua li cas xaiv valve cuam tshuam rau tag nrho cov kev ua haujlwm.

 

Nkag siab txog Ultra High Purity Gas Regulator Valves

Ultra siab purity gas regulator li qub yog cov cuab yeej siv tau tsim los tswj cov roj siab nrog qhov tshwj xeeb tshwj xeeb thaum khaws cia kev ncaj ncees ntawm cov roj ntws. Cov regulators no feem ntau ntsia tau rau ntawm qhov chaw siv los yog tam sim ntawd tom qab cov pa roj los nqis peev uas muaj peev xwm nyob ntawm 3000 psi (pounds ib square inch) lossis siab dua kom qis li 1 psi, nyob ntawm daim ntawv thov.

Tsim thiab Cheebtsam

Lub hauv paus tsim ntawm a UHP gas regulator valve revolves nyob ib ncig ntawm lub siab-sensing mechanism, feem ntau yog ib tug diaphragm los yog piston, uas kho lub valve qhib kom muaj ib tug tas li qhov hluav taws xob qhov hluav taws xob, txawm nyob rau hauv fluctuations ntawm inlet siab los yog txaus xav tau. Hauv cov ntawv thov UHP, diaphragms nyiam dua pistons vim tias lawv muab kev sib cais zoo dua thiab txo qhov kev pheej hmoo ntawm cov khoom tsim los ntawm kev sib cuag hlau-rau-hlau.

Cov khoom tseem ceeb muaj xws li:

- Qhov Chaw Nres Nkoj thiab Qhov Chaw Nres Nkoj: Cov no feem ntau yog cov khoom siv hluav taws xob tsis zoo, xws li VCR (Vacuum Coupling Radiation) lossis kev sib txuas ntawm lub ntsej muag, kom txo qis qhov chaw tuag uas muaj cov kab mob sib sau.

- Siab-Sensing Diaphragm: Ua los ntawm cov ntaub ntawv zoo li Hastelloy C-22 lossis 316L stainless hlau nrog lub siab purity tiav, lub diaphragm flexes teb rau kev hloov siab, ua rau lub poppet lossis lub rooj zaum kom tswj tau ntws.

- Poppet thiab Lub Rooj: Lub poppet yog cov khoom txav tau los ntawm lub rooj zaum kom tswj tau qhov ntws. Hauv UHP regulators, cov no feem ntau yog tsim los ntawm PCTFE (polychlorotrifluoroethylene) los yog lwm yam mos polymers los xyuas kom meej lub kaw ntom nti tsis tsim cov khoom.

- Bonnet thiab Kho Mechanism: Lub kaus mom lub tsev lub caij nplooj ntoos hlav lossis lub dome uas teeb tsa lub qhov hluav taws xob xav tau. Rau cov qauv UHP, lub kaus mom yog vented los yog purged los tiv thaiv atmospheric paug.

UHP regulators feem ntau suav nrog cov yam ntxwv zoo li khi-diaphragm tsim, qhov twg lub diaphragm yog mechanically txuas mus rau poppet, txhim khu kev ntseeg thiab txo txoj kev xau.

Cov Cai Ua Haujlwm

Kev ua haujlwm ntawm UHP roj regulator yog ua raws li lub zog sib npaug. Lub inlet siab thawb tawm tsam lub diaphragm, tawm tsam los ntawm lub caij nplooj ntoos hlav quab yuam los ntawm tus neeg siv. Thaum lub qhov hluav taws xob siab poob qis vim qhov xav tau ntau ntxiv, lub diaphragm txav mus qhib lub valve dav dua, tso cai rau cov roj ntau kom ntws mus txog thaum qhov sib npaug. Hloov pauv, yog tias siab nce, lub valve kaw me ntsis.

Hauv UHP ib puag ncig, cov tswj hwm yuav tsum tswj cov nqi qis kom raug, feem ntau nqes mus rau 1 sccm (tus qauv cubic centimeters ib feeb), yam tsis qhia impurities. Nto tiav yog qhov tseem ceeb; Cov chaw sab hauv yog electropolished rau Ra qhov txiaj ntsig ntawm 5 microinches lossis zoo dua kom txo qis qhov chaw adsorption rau ya raws lossis hydrocarbons.

Cov ntaub ntawv thiab Purity Considerations

Kev xaiv cov ntaub ntawv tseem ceeb heev rau UHP regulators. 316L VIM-VAR (Nqus Induction Melted-Nqus Arc Remelted) stainless hlau yog tus qauv rau wetted qhov chaw vim nws cov ntsiab lus tsis tshua muaj kev cuam tshuam thiab corrosion kuj. Elastomers, yog tias siv, raug txwv rau qib siab-purity zoo li FFKM (perfluoroelastomer) kom tsis txhob muaj kev tawm tsam.

Purity yog khaws cia los ntawm cov txheej txheem tsim khoom nruj, suav nrog kev sib sau ua ke hauv chav huv, helium xau kuaj rau tus nqi qis dua 10^-9 atm-cc / sec, thiab suav cov particles kom ntseeg tau tias tsawg dua 10 cov khoom ib lub cubic feet siab dua 0.1 microns.

daim ntawv sau npe

UHP gas regulators yog ubiquitous nyob rau hauv semiconductor fabs rau cov txheej txheem xws li tshuaj vapor deposition (CVD), qhov twg precision siab tswj ntawm silane los yog arsine gases yog xav tau. Nyob rau hauv kws tshuaj, lawv tswj inert gases rau blanketing reactors. Cov chaw soj ntsuam xyuas siv lawv rau cov roj chromatography muaj xws li helium.

Qhov zoo muaj xws li kev ruaj ntseg siab zoo (± 0.1% ntawm qhov chaw), qis qis (siab poob qis), thiab kev sib raug zoo nrog cov roj corrosive. Txawm li cas los xij, lawv tsis yog qhov zoo tagnrho rau kev kaw tag nrho, vim tias lawv yuav muaj qhov xau me ntsis.

 

Nkag siab txog Ultra High Purity Diaphragm Valves

Ultra siab purity diaphragm li qub yog cov kev sib cais li qub tsim los rau kev tswj-tawm los yog kev hloov kho hauv cov roj purity siab. Tsis zoo li cov neeg tswj hwm, lawv lub luag haujlwm tseem ceeb tsis yog qhov txo qis tab sis tswj kev ntws nrog kev sib khi kom tsis txhob muaj kev sib kis.

Tsim thiab Cheebtsam

Lub hom phiaj ntawm lub diaphragm valve yog nws cov diaphragm hloov tau, uas cais cov txheej txheem kua los ntawm lub actuator mechanism. Qhov kev tsim no tshem tawm qia foob, ntim khoom, lossis lwm qhov chaw xau.

Cov khoom tseem ceeb muaj xws li:

- Lub cev: Feem ntau yog ob-chaw nres nkoj lossis ntau qhov chaw nres nkoj forged 316L stainless hlau thaiv nrog cov ntim tsawg kawg nkaus kom txo tau lub sijhawm purging.

- Diaphragm: Ib daim nyias nyias, hloov tau yooj yim, feem ntau ntau txheej, ua los ntawm PTFE (polytetrafluoroethylene) txhawb nqa los ntawm stainless hlau lossis Elgiloy rau lub zog. Nws seals lub valve los ntawm nias tawm tsam lub weir lossis lub rooj zaum.

- Actuator: tuaj yeem yog phau ntawv (lub tes tuav), pneumatic, lossis hluav taws xob. Hauv UHP qauv, pneumatic actuators yog ib qho kev ua haujlwm nyob deb, nrog rau txoj haujlwm tsis zoo.

- Weir lossis Seat: Qhov chaw tsa hauv lub cev tiv thaiv cov diaphragm seals. Rau UHP, nws yog polished rau daim iav tiav.

Diaphragm li qub tuaj nyob rau hauv ncaj-los ntawm los yog weir-hom configurations. Weir-types muaj ntau dua hauv UHP vim muaj cov yam ntxwv zoo dua thiab kev ntxuav yooj yim dua.

Cov Cai Ua Haujlwm

Thaum kaw, lub actuator compresses lub diaphragm tiv thaiv lub weir, tsim ib tug hermetic foob. Qhib lub valve nqa lub diaphragm, cia cov roj ntws. Lub diaphragm qhov yooj yim ua kom tsis muaj hlau-rau-hlau sib cuag hauv txoj kev ntws, txo cov khoom me me.

Hauv UHP cov tshuab, cov li qub no feem ntau muaj peev xwm ci tawm mus txog 150 ° C kom tshem tawm cov dej noo noo. Lub neej voj voog yog siab, feem ntau tshaj 1 lab lub voj voog, ua tsaug rau lub diaphragm resilience.

Cov ntaub ntawv thiab Purity Considerations

Zoo ib yam li regulators, wetted qhov chaw yog 316L VIM-VAR stainless hlau nrog electropolished tiav. Diaphragms yog nkauj xwb PTFE los yog hloov PTFE rau tshuaj inertness. Kev sib dhos tshwm sim hauv ISO Class 5 chav huv, nrog rau kev sim rau helium leaks thiab particle tiam.

Purity yog txhim kho los ntawm lub valve txoj kev tuag-leg-dawb tsim, uas tiv thaiv cov roj stagnation thiab cov kab mob sib kis.

daim ntawv sau npe

UHP diaphragm li qub yog qhov tseem ceeb hauv biotechnology rau sterile gas hloov, nyob rau hauv lub hnub ci vaj huam sib luag tsim rau silane tuav, thiab nyob rau hauv LED ntau lawm rau dopant gases. Lawv ua tau zoo hauv cov tshuab uas yuav tsum tau caij tsheb kauj vab ntau zaus lossis qhov twg xoom xau yog qhov tseem ceeb, xws li cov kab nqus.

Cov txiaj ntsig zoo suav nrog kev ua kom zoo dua qub (zoo dua 10^-10 atm-cc / sec), kev saib xyuas yooj yim (kev hloov diaphragm yam tsis tau tshem lub valve ntawm kab), thiab tiv thaiv kev tawm tsam hnyav. Cov kev txwv muaj xws li kev poob siab dua piv rau cov pob li qub thiab muaj peev xwm ua rau qaug zog diaphragm thaum lub sijhawm.

 

Qhov txawv ntawm UHP Gas Regulator Valves thiab UHP Diaphragm Valves

Txawm hais tias ob lub valve yog ib qho tseem ceeb rau UHP roj tshuab, lawv qhov sib txawv nyob rau hauv kev ua haujlwm, tsim, kev ua tau zoo, thiab kev thov kom haum.

Kev ua haujlwm txawv

Qhov tseem ceeb tshaj qhov sib txawv yog lawv lub hom phiaj. UHP gas regulator li qub yog cov tswj lub siab, dynamically kho kom muaj lub teeb hluav taws xob siab. Lawv tsis yog tsim los rau kev sib cais tag nrho; txawm tias thaum "kaw," lawv tuaj yeem tso cai tsawg kawg nkaus kom nkag siab qhov siab. Hauv qhov sib piv, UHP diaphragm li qub yog cov tswj dej ntws, muab qhov zoo kaw kom cais cov ntu ntawm qhov system.

Piv txwv li, nyob rau hauv ib tug gas xa manifold, ib tug regulator yuav txo lub tog raj kheej siab los ntawm 2000 psi mus rau 50 psi, thaum lub diaphragm li qub yuav siv los hloov ntawm lub tog raj kheej los yog lub qhov cua kab.

Tsim thiab tsim qhov sib txawv

Regulators suav nrog cov ntsiab lus siab-sensing thiab kho cov txheej txheem, ua rau lawv nyuaj dua nrog cov springs, bonnets, thiab gauges. Diaphragm li qub yog qhov yooj yim dua, tsom mus rau lub diaphragm-actuator interface.

Nyob rau hauv cov nqe lus ntawm kev khiav dej num, regulators feem ntau muaj ib tug tortuous txoj kev rau kev txo siab, uas yuav qhia tau ntau lub peev xwm rau kev sib kis yog tsis tsim nyog. Diaphragm li qub muab txoj hauv kev ncaj nraim nrog qhov tsawg kawg nkaus.

Cov ntaub ntawv sib tshooj, tab sis cov neeg tswj xyuas yuav siv cov khoom siv hlau ntau hauv qhov chaw hnov, thaum lub diaphragm li qub cia siab rau cov khoom siv polymeric rau kev sib khi.

Kev Kawm Tau Zoo

Kev tuav tswj qhov sib txawv: Cov neeg tswj hwm tswj qhov siab nkag siab nrog lub qhov hluav taws xob qis, nthuav tawm qis qis thiab kaw-up (siab nce thaum ntws nres). Diaphragm li qub tau ntsuas rau tag nrho cov kab siab tab sis qhia Cv (flow coefficient) qhov tseem ceeb uas cuam tshuam rau cov nqi ntws.

Kev saib xyuas huv huv: Ob qho tib si zoo, tab sis diaphragm li qub muab kev sib cais zoo dua los ntawm cov actuators, txo kev pheej hmoo los ntawm cov roj nplua nyeem lossis cov cua nkag. Regulators yuav xav tau purging ports rau kev tiv thaiv zoo sib xws.

Lub neej voj voog thiab kev saib xyuas: Diaphragm li qub tau tsim rau lub voj voog siab tab sis yuav tsum tau hloov diaphragm ib ntus. Regulators muaj lub sijhawm ua haujlwm ntev dua tab sis yuav xav tau rov ua dua.

 

Qhov zoo thiab kev txwv hauv kev sib piv

UHP regulators muab cov kev tswj kom meej tsis tuaj yeem los ntawm cov diaphragm li qub ib leeg, ua rau lawv tsis muaj peev xwm rau cov txheej txheem rhiab rau kev hloov pauv siab. Txawm li cas los xij, lawv kim dua thiab bulkier.

Diaphragm li qub muab kev ntseeg siab nyob rau hauv kev sib cais, nrog tus nqi qis dua ib chav tsev, tab sis tsis muaj kev tswj xyuas qhov siab, feem ntau yuav tsum tau ua ke nrog cov tswj hwm.

Nyob rau hauv ib puag ncig corrosive, ob qho tib si ua tau zoo, tab sis diaphragm li qub 'PTFE Cheebtsam muab lawv ib qho ntug nrog cov roj reactive heev.

 

Daim ntawv thov-Specific sib txawv

Nyob rau hauv semiconductor etching, ib tug regulator kom zoo ib yam precursor gas siab rau lub chamber, thaum lub diaphragm li qub tswj cov roj nkag lub sij hawm. Nyob rau hauv cov tshuaj filling kab, regulators tuav pam pa roj siab, thiab diaphragm li qub kom tsis muaj menyuam cais.

Kev xaiv ntawm lawv nyob ntawm seb qhov kev xav tau yog rau kev ruaj ntseg siab lossis kev sib cais ntws. Feem ntau, cov tshuab ua ke ua ke ob qho tib si rau kev ua haujlwm zoo.

 

xaus

Qhov sib txawv ntawm ultra siab purity gas regulator li qub thiab ultra siab purity diaphragm li qub boils mus rau lawv lub luag hauj lwm hauv kev tswj roj: kev cai tiv thaiv kev rho tawm. Thaum sib koom cov hom phiaj ntawm kev khaws cia purity los ntawm cov khoom siv siab heev thiab cov qauv tsim, lawv cov qauv kev ua haujlwm thiab cov ntawv thov tau muab cais tawm. Cov kws kho tsheb yuav tsum xav txog qhov yuav tsum tau ua hauv lub cev, xws li kev tswj xyuas qhov xav tau los tiv thaiv kev ntseeg siab, thaum xaiv cov li qub.

Los ntawm kev nkag siab txog cov kev sib txawv no, kev lag luam tuaj yeem txhim kho kev ua tau zoo, txo cov kev pheej hmoo kis kab mob, thiab txhim kho cov khoom lag luam. Raws li kev siv thev naus laus zis, kev tsim qauv hybrid tuaj yeem tshwm sim, tab sis tam sim no, cov li qub no tseem yog lub hauv paus rau UHP roj tuav.

Yog xav paub ntxiv txog dab tsi yog qhov txawv ntawm ultra siab purity gas regulator valve vs Ultra siab purity diaphragm li qub, koj tuaj yeem them mus ntsib Jewellok ntawm https://www.jewellok.com/product-category/ultra-high-purity-diaphragm-valves/ yog xav paub ntau info.