


Integrated Gas System (IGS) Modular Integrated Gas Systems (TMS) Integrated Gas Supply System Rau Semiconductor Thiab Laboratory
Integrated Gas System (IGS) Modular Integrated Gas Systems (TMS) Integrated Gas Supply System Rau Semiconductor Thiab Laboratory
Shenzhen Jewellok Technology Co., Ltd. specializes nyob rau hauv tshwj xeeb gas pipeline engineering, laboratory gas pipeline engineering, tshwj xeeb roj pipeline engineering siv, thiab roj pipeline engineering installation. Peb yog ib lub tuam txhab tshwj xeeb gas pipeline engineering installation tuam txhab uas lees paub qhov chaw kuaj tshwj xeeb roj pipeline engineering manufacturers, scrubber tso pa roj kho system engineering, theem nrab roj faib pipelines, high-purity gas pipelines, roj siab txo li qub, roj busbars, roj proportioners, purifiers, tshwj xeeb roj txee, busbars, tis txee, VMB txee, VDB txee, VGSDPs, txee thiab lwm yam.
Integrated Gas Systems (IGS) yog qhov tseem ceeb rau kev xa cov roj purity siab hauv cov khoom siv hluav taws xob semiconductor thiab cov chaw kuaj mob. Cov tshuab no ua kom meej meej, nyab xeeb, thiab muaj txiaj ntsig zoo rau cov txheej txheem xws li wafer fabrication, chemical vapor deposition, thiab analytical testing. IGS koom ua ke cov khoom xws li lub tog raj kheej roj, cov neeg tswj xyuas, cov li qub, thiab kev soj ntsuam cov tshuab rau hauv kev sib koom ua ke, txo qis kev pheej hmoo kis kab mob thiab ua kom muaj kev ntseeg siab ua haujlwm.
Modular Integrated Gas Systems (TMS) txhim kho IGS los ntawm kev muab cov qauv tsim tau yooj yim, scalable. TMS tso cai rau kev teeb tsa yooj yim thiab nthuav dav kom tau raws li cov txheej txheem tshwj xeeb. Nws modular xwm simplifies installation, txij nkawm, thiab hloov khoom dua tshiab, txo downtime nyob rau hauv semiconductor fabs thiab labs. Txhua lub module tuaj yeem tswj tau cov roj sib txawv, kev kub ntxhov, lossis cov nqi ntws, ua kom muaj kev hloov kho thaum tswj kev nyab xeeb thiab purity qauv. TMS yog tshwj xeeb muaj nuj nqis nyob rau hauv ib puag ncig dynamic uas cov txheej txheem xav tau hloov zuj zus sai.
Integrated Gas Supply System yog lub hauv paus ntawm kev tswj hwm roj hauv cov chaw no. Nws encompasses gas cia, purification, faib, thiab saib xyuas, xyuas kom meej uninterrupted mov rau cov cuab yeej thiab kev sim. Rau cov khoom siv hluav taws xob, nws txhawb nqa cov txheej txheem uas yuav tsum tau muaj cov roj purity ultra-high-purity xws li nitrogen, argon, lossis hydrogen, qhov twg txawm tias cov kab mob paug tuaj yeem ua rau cov khoom puas. Nyob rau hauv lub chaw soj nstuam, nws ua kom yooj yim xa cov pa xa mus rau cov cuab yeej tshuaj ntsuam xyuas xws li roj chromatographs.
Cov tshuab no tseem ceeb rau kev nyab xeeb nrog cov yam ntxwv zoo li kev tshawb nrhiav pom, kev tswj xyuas siab, thiab kev kaw tsis siv neeg. Lawv kuj ua raws li cov qauv kev lag luam nruj, xws li SEMI cov kev cai rau semiconductors. Los ntawm kev sib koom ua ke ntawm cov sensors siab heev thiab kev tswj hwm, IGS thiab TMS pab saib xyuas lub sijhawm tiag tiag, kom ntseeg tau tias kev ua haujlwm zoo thiab kev taug qab. Lawv cov qauv tsim kom txuag tau qhov chaw, qhov tseem ceeb hauv chav huv, thaum txo cov nqi ua haujlwm los ntawm kev siv roj tau zoo. Ua ke, IGS, TMS, thiab cov khoom siv roj sib xyaw ua ke yog qhov tseem ceeb rau kev txiav txim siab, kev nyab xeeb, thiab kev ua haujlwm zoo hauv kev siv high-tech.
Kev ntaub ntawv
| qauv | JW-300-BSGS |
| specification | W800 * D633 * H2172 |
| Tshwj xeeb roj txee loj | Tswj fais fab mov: 220VAC, 50HZ, 500W, cua sov fais fab mov: 220VAC, 50HZ, 1-6KW |
| Tswj txee fais fab mov | PN 2,1, 4/XNUMX "MVCR |
| purge | HPN 2,1, 4/XNUMX" MVCR |
| Kev kub siab tuav | GN2.1/4" MVCR |
| lub tshuab nqus tsev | 1/2" MVCR |
| VENT cov kav dej | CDA tsav tsheb, 1/4 "SWG |
| Pneumatic cua qhov chaw | OD 150MM, silane 810m / h; lwm 204m3/h |
| Txee qhov cua | Tsis siv neeg hloov, tsis siv neeg purging, tawg-pov thawj thiab tiv thaiv tawm txee, tawg-pov thawj nws tus kheej-locking qhov rooj, tawg-pov thawj iav tsom qhov rais, xau tswb, tej thaj chaw deb txiav tawm, tsis zoo lub tswb |
| Cov sijhawm ua haujlwm interface | 10 "xim kov npo |
nta:
Functionality: Tshwj xeeb yog tsim los rau cov nplaim taws, tshuaj lom, lossis corrosive gases xws li hydrogen, ammonia, thiab chlorine.
Daim Ntawv Thov: Ib puag ncig tseem ceeb xws li cov khoom siv hluav taws xob semiconductor, cov chaw sim roj tshwj xeeb, thiab cov chaw tshawb fawb nrog cov kev cai nruj nruj.
Txoj Kev Tswjhwm: Ua kom tiav nrog PLC tswj, suav nrog cov roj sensors, cov kiv cua tso pa tawm, kev tswj hluav taws, thiab tswj kev nkag.
Cov Ntsej Muag Kev Nyab Xeeb:
1) Cov khoom tawg-pov thawj hluav taws xob
2) Kev tswj qhov cua thiab tso pa tawm
3) Cov khoom siv hluav taws xob / tshuaj lom neeg tshawb pom thiab lub tswb cuam tshuam
4) Thaum muaj xwm ceev kaw li qub
5) Kev xaiv hluav taws kub los yog roj purification modules
yeem
* UV / IR nplaim taws ntes
* Lub tog raj kheej kaw
* Vaj huam sib luag cua sov
* Ethernet kev sib txuas lus module
* Ntsuas qhov hnyav
* Tshaj Flow Switch





Jewellok specializes nyob rau hauv tag nrho tsis siv neeg thiab semi-automatic GC roj txee, BSGS roj txee, VMB roj txee, TMA roj txee, Scrubber Tail Gas kho txee, roj faib txee, VDB roj txee, thiab VDP roj txee, haum rau gases xws li SiH4, NF3, NH3, N2O, thiab HCI.






