VMB Valve Manifold Box Thiab Vaj Huam Sib Luag Gas Txee, BSGS Gas Txee, TMA Gas Txee, Scrubber Tail Gas Kho Txee

VMB Valve Manifold Box Thiab Vaj Huam Sib Luag Gas Txee, BSGS Gas Txee, TMA Gas Txee, Scrubber Tail Gas Kho Txee

Valve Manifold Boxes (VMBs) thiab Vaj Huam Sib Luag (VMPs) yog cov khoom tseem ceeb hauv cov khoom siv roj purity siab, tsim kom muaj kev nyab xeeb thiab muaj txiaj ntsig zoo hauv kev lag luam xws li semiconductors thiab tshuaj. VMBs faib ib qho roj rau hauv ntau qhov hluav taws xob, feem ntau txhawb nqa 4 mus rau 8 sticks, nrog cov yam ntxwv zoo li lub qhov cua / tshem tawm thiab lub tshuab nqus tsev rau kev nyab xeeb ntawm cov pa phem. Lawv tuaj nyob rau hauv txee (rau cov pa phem) los yog vaj huam sib luag (rau inert gases) configurations, muab phau ntawv rau tag nrho automated tswj nrog kev nyab xeeb nta xws li UV / IR sensors, tshuaj lom roj saib, thiab thaum muaj xwm ceev kaw li qub. Cov tshuab no xyuas kom meej cov roj ntws, qis qis qis, thiab ua raws li cov qauv kev nyab xeeb.

Bulk Specialty Gas Systems (BSGS) Gas Cabinets yog tsim los rau kev xa cov pa roj siab, txhawb kev siv loj. Lawv haum 1-3 lub tog raj kheej, nrog kev tswj xyuas qhov siab, kev tshem tawm cov tshuab, thiab PLC tswj rau kev lag luam txhim khu kev qha. BSGS cov khoom yog tsim rau ultra-high-purity gases, featuring orbital-welded panels thiab kev ruaj ntseg interlocks, ua rau lawv zoo tagnrho rau semiconductor manufacturing.

TMA (Trimethylaluminum) Gas Txee yog tshwj xeeb rau kev tuav cov pa roj ntau heev thiab pyrophoric zoo li TMA, siv rau hauv cov txheej txheem xws li atomic txheej deposition. Cov txee no suav nrog cov yam ntxwv muaj kev nyab xeeb zoo li cov hluav taws kub hnyiab, kev tshawb nrhiav pom, thiab cov pa hluav taws xob los tswj cov phom sij txaus ntshai, ua kom tus neeg teb xov tooj muaj kev nyab xeeb thiab kev ncaj ncees.

Scrubber Tail Gas Treatment Cabinets kho cov pa pa tawm los ntawm cov txheej txheem tsim khoom, ua rau muaj kev phom sij txaus ntshai ua ntej tso tawm. Nruab nrog kev pom zoo thiab tshuaj txhuam hniav, lawv ua kom muaj kev ua raws li ib puag ncig los ntawm kev txo qis emissions ntawm cov pa phem lossis corrosive gases. Cov tshuab no tseem ceeb heev rau kev ua haujlwm ruaj khov hauv kev lag luam high-tech.

Ua ke, cov tshuab no muab kev nyab xeeb, txhim khu kev qha, thiab kev tswj hwm roj zoo rau kev tsim khoom siab heev.

 

Kev ntaub ntawv

Jewellok specializes nyob rau hauv tag nrho tsis siv neeg thiab semi-automatic GC roj txee, BSGS roj txee, VMB roj txee, TMA roj txee, Scrubber Tail Gas kho txee, roj faib txee, VDB roj txee, thiab VDP roj txee, haum rau gases xws li SiH4, NF3, NH3, N2O, thiab HCI.

qauv	JW-200-VMB, JW-100-VMB
specification	4S / 6S / 8S
Tshwj xeeb roj txee loj	W870 * D340 * H1680
Tswj txee fais fab mov	Tswj fais fab mov: 220VAC, 50HZ, 500W, cua sov fais fab mov: 220VAC, 50HZ, 1-6KW
purge	PN 2,1, 4/XNUMX "MVCR
lub tshuab nqus tsev	GN2.1/4" MVCR
VENT cov kav dej	1/2" MVCR
Pneumatic cua qhov chaw	CDA tsav tsheb, 1/4 "SWG
Txee qhov cua	OD 100 hli, 70m3 / h
Cov khoom siv	Explosion-proof thiab anti-sparation txee, tawg-pov thawj nws tus kheej-locking qhov rooj, tawg-pov thawj iav tsom qhov rais, tej thaj chaw deb txiav tawm
Cov sijhawm ua haujlwm interface	7 "xim kov npo

yeem

*UV/IR
* Vaj huam sib luag cua sov
* Ethernet kev sib txuas lus module
* Kub kub hloov
* Cov pa taws sensor