Yog vim li cas cov khoom ntawm CO2 Cov Pa roj huv siab heev Lub Valve Txo Qhov Siab Tseem Ceeb Li Cas?

Hauv lub ntiaj teb ntawm kev xa roj ultra-high purity (UHP), tshwj xeeb tshaj yog rau cov pa roj carbon dioxide (CO2), txhua yam khoom yog qhov ua rau muaj kuab paug. Txawm hais tias muaj kev saib xyuas ntau rau cov lim dej, cov kav dej, thiab cov chaw kawg, lub qhov txo qis siab (PRV), lossis tus tswj, ua haujlwm ua tus neeg saib xyuas qhov rooj tseem ceeb - thiab feem ntau tsis muaj zog -. Nws cov khoom siv tsis yog tsuas yog qhov teeb meem ntawm kev ruaj khov; nws yog qhov tseem ceeb ntawm kev txiav txim siab ntawm kev huv ntawm lub kaw lus, kev ua tiav ntawm cov txheej txheem, thiab qhov zoo ntawm cov khoom kawg. Tsab xov xwm no delves rau hauv kev tshawb fawb thiab kev tsim kho tom qab cov khoom siv nruj rau CO2 UHP roj siab txo cov valves, tshawb nrhiav cov txiaj ntsig ntawm kev xaiv tsis raug thiab piav qhia cov qauv uas txhais cov kev coj ua zoo tshaj plaws hauv kev lag luam xws li kev tsim khoom semiconductor, kev tsim tshuaj, thiab kev tshuaj xyuas tshuaj lom neeg siab heev.

1. Qhov Kev Sib Tw Tshwj Xeeb ntawm Ultra-High Purity CO2

Cov pa roj carbon dioxide hauv cov ntawv thov UHP (feem ntau yog 99.999% purity lossis siab dua, nrog rau cov khoom ib billion lossis txawm tias cov khoom ib trillion ntawm cov khoom tsis huv tshwj xeeb) yog siv rau hauv cov txheej txheem rhiab heev. Piv txwv li suav nrog:

• Semiconductor Fabrication: Tseem ceeb rau kev tsim photoresist, wafer txias, thiab ua cov kua supercritical rau kev ntxuav thiab ziab.

• Pharmaceuticals: Siv rau hauv kev rho tawm kua supercritical (SFE) thiab chromatography (SFC), qhov twg cov pa phem tuaj yeem ua rau cov khoom ua puas tsuaj lossis ua rau cov txiaj ntsig tsis sib xws.

• Khoom noj & dej haus: Rau kev ua kom raug carbonation thiab rho tawm cov saj zoo nkauj.

• Advanced Analytics: Hauv cov roj nqa thiab cov theem txawb rau cov roj chromatography.

CO2 muaj cov teeb meem tshwj xeeb rau kev tuav. Nws khaws cia ua cov roj liquefied nyob rau hauv qhov siab siab (piv txwv li, 850 psi hauv lub tog raj kheej ntawm 21 ° C). Thaum cov kua dej ntom ntom no dhau los ua kom txo qis sai - lub luag haujlwm ntawm PRV - nws tuaj yeem ntsib qhov kub thiab txias poob qis (Joule-Thomson effect), uas ua rau muaj dej khov (dej khov qhuav) thiab thermal shock. Ntxiv mus, CO2 nyob rau hauv qhov muaj dej noo tsim carbonic acid (H₂CO₃), tus neeg sawv cev tsis muaj zog tab sis corrosive, tshwj xeeb tshaj yog nyob rau hauv qhov siab.

Lub hom phiaj tseem ceeb ntawm lub kaw lus UHP yog xa cov roj los ntawm qhov chaw mus rau qhov chaw siv (POU) yam tsis ntxiv cov khoom me me, cov dej noo, cov hydrocarbons, lossis lwm yam khoom tsis huv. Lub valve txo qhov siab yog qhov khoom siv hloov pauv tshaj plaws hauv cov saw hlau no. Nws cov nplaim sab hauv raug rau qhov sib txawv ntawm qhov siab tag nrho, thiab nws cov khoom txav mus los (cov foob, cov caij nplooj ntoos hlav, cov diaphragms) sib cuam tshuam tas li nrog cov roj ntws. Yog li ntawd, nws cov khoom siv xaiv ncaj qha tswj peb txoj hauv kev ua qias tuaj: kev xeb thiab kev tsim cov khoom me me, kev nkag mus thiab kev tawm mus, thiab kev nqus / kev tshem tawm.

2. Cov Txheej Txheem Ua Rau Muaj Kab Mob: Lub Zeem Muag Uas Saib Xyuas Cov Khoom Siv

2.1. Kev xeb thiab kev tsim cov khoom me me

Qhov no yog hom kev ua tsis tiav ncaj qha tshaj plaws. Yog tias lub cev valve lossis cov khoom sab hauv yog ua los ntawm cov ntaub ntawv tsis sib xws, CO2 thiab nws cov khoom tsis huv (tshwj xeeb tshaj yog cov dej noo thiab oxygen) tuaj yeem ua rau xeb.

• Qib Txheem piv rau UHP: Ib lub tshuab tswj kev lag luam txheem yuav siv lub cev tooj dag lossis cov hlau tsis xeb qib qis dua (piv txwv li, 304 SS). Tooj dag muaj tooj liab thiab zinc, uas tuaj yeem leach cov ions mus rau hauv cov pa roj, qhov xwm txheej puas tsuaj rau cov txheej txheem semiconductor qhov twg cov hlau ions yog "cov kab mob tua neeg." Txawm tias 304 SS, nrog nws cov pa roj carbon ntau dua thiab kev tiv thaiv corrosion tsawg dua, tuaj yeem raug micro-xeb, poob cov hlau (hlau) me me.

• Kev Dais Teeb Meem: Cov Hlau Stainless Uas Muaj Kev Ua Haujlwm Zoo: Cov txheej txheem UHP CO2 thoob ntiaj teb qhia txog 316L lossis 316L VIM-VAR (Vacuum Induction Melted – Vacuum Arc Remelted) Stainless Steel.

  • 316L: Cov. Tus "L" txhais tau tias cov pa roj carbon tsawg (<0.03%), tiv thaiv chromium carbide nag ntawm cov ciam teb thaum lub sijhawm vuam (sensitization), uas ua rau kev tiv thaiv corrosion zoo dua.

  • VIM-VAR: Cov txheej txheem yaj ob npaug no tsim cov hlau zoo sib xws, tsis muaj cov khoom sib xyaw nrog cov qib qis ntawm cov khoom tsis huv (oxygen, nitrogen) thiab cov qauv zoo dua. Qhov tshwm sim yog qhov du thiab zoo dua, tiv taus xeb nrog tsawg dua qhov chaw pib rau pitting lossis scaling. Txhua qhov xeb lossis scaling tsim cov khoom me me, uas tuaj yeem txhaws cov qhov dej ntws, txheej cov chaw rhiab heev (xws li cov iav kho qhov muag ntawm wafers), lossis tsim cov qhov tsis zoo hauv cov qauv nanostructures.

2.2. Kev Nkag Mus Thiab Kev Tawm Pa

Kev nkag mus yog qhov kev sib kis ntawm cov pa roj molecule hla cov khoom khov. Kev tawm pa tawm yog qhov kev tshem tawm ntawm cov molecule (dej pa, hydrocarbons, cov kuab tshuaj) uas tau nqus lossis nqus rau hauv cov khoom lossis qhov chaw.

• Cov ntsaws ruaj ruaj Elastomer: Cov khoom siv tswj hwm ib txwm siv Buna-N lossis Viton® elastomer seals. Cov polymers no nkag tau rau cov molecules me me xws li helium, hydrogen, thiab, qhov tseem ceeb, cov pa roj hauv huab cua (O₂, N₂, H₂O). Hauv cov dej ntws UHP CO2, lawv tuaj yeem ua haujlwm ua lub twj tso kua mis, tso cai rau huab cua ib puag ncig nkag mus rau hauv. Qhov phem dua, lawv tso tawm ntau cov hydrocarbons thiab plasticizers, rhuav tshem cov pa roj huv.

• Kev Dais Teeb Meem: Cov Qauv Uas Muaj Hlau Kaw Los Yog Cov Qauv Uas Muaj Cov Khoom ...

  • Cov Hlau Diaphragms & Cov Ntsaws: Rau cov ntawv thov purity siab tshaj plaws, tag nrho-welded diaphragm li qub nrog cov hlau diaphragms (feem ntau 316L) yog siv. Cov no tshem tawm permeation thiab hydrocarbon outgasses tag nrho. Lub rooj zaum yuav yog riam-ntug hlau-rau-hlau foob lossis siv cov hlau mos, purity siab zoo li nyiaj.

  • Cov Polymers Huv Si: Qhov twg xav tau kev ywj pheej (piv txwv li, hauv lub diaphragm tswj hwm tseem ceeb), cov qib tshwj xeeb uas tau ntxuav thiab kho ntawm cov polymers xws li ETFE (Tefzel®) lossis PTFE (Teflon®) raug siv. Cov no muaj qhov permeability qis dua thiab raug ua tiav los txo cov ntsiab lus volatile. Kalrez® lossis Chemraz® perfluoroelastomers yog siv rau cov foob pob hluav taws, muab kev tiv thaiv tshuaj zoo heev thiab qis outgassing.

2.3. Kev Nqus Tawm thiab Kev Tshem Tawm (Qhov "Kev Cuam Tshuam Nco")

Qhov chaw sab hauv ntawm lub tshuab tswj yog ib daim txhuam cev rau cov khoom tsis huv. Yog tias qhov chaw ntawd ntxhib lossis ua los ntawm cov khoom siv uas ua rau muaj kev cuam tshuam, nws tuaj yeem nqus cov dej noo, cov hydrocarbons, lossis lwm yam pa roj thaum lub sijhawm tsis ua haujlwm lossis los ntawm cov pa roj yav dhau los. Thaum UHP CO2 ntws, kev hloov pauv ntawm lub siab thiab kub tuaj yeem ua rau cov khoom tsis huv no ploj mus rau hauv cov pa roj - qhov xwm txheej hu ua "kev nco qab" lossis "kev mob nkeeg ntawm lub tshuab tswj."

• Xaus Ntoo: Kev xaiv cov khoom siv yog txuas nrog rau qhov ua tiav ntawm qhov chaw. 316L VIM-VAR tuaj yeem txhuam kom tiav Electropolished (EP) nrog qhov roughness ntawm qhov chaw (Ra) ntawm 10 micro-inches lossis tsawg dua. Electropolishing tsis yog tsuas yog tsim kom muaj qhov chaw du zoo li daim iav uas txo qhov chaw nqus tab sis kuj ua rau qhov chaw hla dhau, tsim cov txheej chromium oxide uas ruaj khov, inert.

• Cleanability: Cov ntaub ntawv xaiv yuav tsum tiv taus cov txheej txheem ntxuav hnyav xws li Clean-In-Place (CIP) lossis Supercritical CO2 ntxuav yam tsis muaj kev puas tsuaj. Ib qho du, electropolished 316L nto tso cai rau kev tshem tawm tag nrho cov pa phem thaum ntxuav, rov qab kho lub valve kom nws cov kev ua haujlwm huv qub.

3. Cov Lus Qhia Txog Khoom Siv Hauv Kev Xyaum: Tsim UHP CO2 PRV

Ib qho zoo tshaj plaws hauv chav kawm UHP CO2 roj siab txo qhov valve yog ib zaj nkauj ua los ntawm cov ntaub ntawv xaiv tau zoo:

1. Lub cev & Lub kaus mom: 316L VIM-VAR Stainless Steel, electropolished sab hauv. Tag nrho cov welds yog orbital TIG (Tungsten Inert Gas) welded nyob rau hauv argon purge kom tiv thaiv oxidation thiab tswj kom muaj kev ntws mus tas li, du.

2. Lub diaphragm: Lub plawv ntawm lub regulator. Rau qhov purity kawg, siv lub stainless hlau diaphragm. Rau cov ntawv thov purity siab uas xav tau kev rhiab heev ntau dua, lub ETFE polymer diaphragm tshwj xeeb uas tau ntxuav thiab kho tau teev tseg.

3. Cov Caij Nplooj Ntoos Hlav Sab Hauv: Inconel X-750 lossis 718, cov hlau alloys paub txog lawv qhov ruaj khov, tiv taus "teeb ​​tsa" nyob rau hauv qhov hnyav tas li, thiab sib xws nrog qhov siab, tej zaum yuav corrosive ib puag ncig.

4. Rooj Zaum & Cov Ntiv Tes: Cov qauv riam hlau tsis xeb rau cov qauv uas muaj hlau zaum, lossis PTFE/Kalrez® rau cov qauv uas muaj mos. Qee zaum nyiaj siv ua cov khoom siv zaum vim nws yooj ywm thiab huv.

5. Cov Gaskets & Cov Xov Sealants: Tsis muaj cov gaskets elastomer nyob rau hauv txoj kev roj. Cov kev sib txuas siv cov khoom siv foob gasket hlau (piv txwv li, VCR®) lossis cov qauv tsim uas vuam tag nrho. Cov sealant xov raug txwv; txhua qhov kev sib txuas raug kaw los ntawm kev hloov pauv hlau.

4. Tus Nqi ntawm Kev Sib Tw: Cov txiaj ntsig ntawm Kev Xaiv Khoom Siv Tsis Zoo

Siv lub tshuab tswj qib kev lag luam ntawm kab UHP CO2 yog qhov muaj kev pheej hmoo siab:

• Kev Poob Qis: Hauv cov chaw tsim khoom semiconductor, ib qho khoom me me lossis cov hlau ppb uas muaj kuab paug tuaj yeem ua rau lub pwm lossis tag nrho lub wafer puas tsuaj, ua rau muaj kev poob nyiaj ntau pua txhiab daus las.

• Cov khoom paug: Hauv SFE tshuaj, cov pa roj carbon dioxide tawm ntawm lub foob tuaj yeem ua rau cov khoom xyaw ua qias tuaj, uas yuav tsum tau siv sijhawm ntau thiab kim heev los tshem tawm thiab ntxuav.

• Lub Sijhawm Tsis Ua Haujlwm ntawm Cov Cuab Yeej & Kev puas tsuaj ntawm cov ntaub ntawv: Hauv cov chaw soj ntsuam, cov khoom tsis huv los ntawm tus tswj hwm ua rau muaj kev hloov pauv yooj yim, cov ncov dab, thiab lub suab nrov ntawm lub tshuab ntes hauv chromatographs, ua rau cov ntaub ntawv tsis txhim khu kev qha, kev tshuaj xyuas rov ua dua, thiab lub sijhawm tsis ua haujlwm ntawm cov cuab yeej rau kev txij nkawm.

• Kev Txij Nkawm Tsis Tau Npaj Tseg: Kev tsim cov khoom me me los ntawm kev xeb ua rau muaj kev hloov lim dej thiab hloov lub valve ntau zaus, ua rau tag nrho cov nqi ntawm kev muaj ntau dua li qhov kev txuag nyiaj thawj zaug ntawm tus tswj.

5. Cov Qauv Kev Lag Luam thiab Kev Pom Zoo

Kev xaiv cov khoom siv yog coj los ntawm cov qauv nruj. Piv txwv li, SEMI Standard F19 (rau CO2 siv rau hauv cov pa roj hluav taws xob) qhia meej txog cov kev txwv nruj rau cov dej noo, oxygen, tag nrho cov hydrocarbons, thiab cov khoom me me. Kev ua tau raws li cov kev txwv no ntawm POU yog tsis yooj yim sua nrog PRV qis dua. Cov li qub raug lees paub los ntawm:

• Kev Ntsuas Qhov Xaus Helium Mass Spectrometer: Yuav kom ntseeg tau tias muaj kev ncaj ncees.

• Kev Ntsuas Npuas Rau Cov Khoom Me Me: Ib SEMI F19.

• Kev Ntsuas Cov Khoom Siv Ntsuas Dej thiab Cov Pa oxygen: Yuav kom paub tseeb tias lub valve tsis ntxiv lossis ntes cov pa phem tseem ceeb no.

• Kev Ntsuas Pa Tawm: Cua sov lub valve nyob rau hauv lub tshuab nqus tsev thiab ntsuas cov hom desorbed.

xaus

Hauv qhov chaw tswj hwm zoo ntawm kev xa CO2 uas muaj kev ntshiab heev, lub valve txo qhov siab tsis yog tsuas yog lub cuab yeej tswj qhov siab xwb; nws yog lub interface uas khaws cia kev ntshiab. Nws cov khoom siv sib xyaw - los ntawm cov hlau sib xyaw ntawm nws lub cev mus rau cov polymer ntawm nws lub diaphragm - yog qhov kev tiv thaiv tseem ceeb tiv thaiv ntau yam kev ua qias tuaj: kev tsim cov khoom me me corrosive, cov pa roj hauv huab cua, cov pa roj hydrocarbon tawm, thiab cov teebmeem nco.

Kev hloov pauv ntawm kev lag luam mus rau 316L VIM-VAR stainless hlau, cov nplaim electropolished, thiab cov hlau lossis ultra-clean polymer diaphragms tsis yog qhov kev nyiam rau cov khoom siv zoo tshaj plaws. Nws yog kev teb ncaj qha, kev tshawb fawb-raws li kev tshawb fawb rau tus nqi tsis zoo ntawm kev tsis huv hauv kev tsim khoom siab heev thiab kev tshawb fawb. Yog li ntawd, kev nqis peev hauv PRV nrog cov ntaub ntawv teev tseg kom raug yog kev nqis peev hauv kev ntseeg siab ntawm cov txheej txheem, qhov zoo ntawm cov khoom, thiab thaum kawg, qhov kawg. Raws li qhov yuav tsum tau ua kom huv si txuas ntxiv mus rau qib-ib-trillion, cov ntaub ntawv tshawb fawb tom qab cov khoom tseem ceeb no tsuas yog yuav loj hlob hauv qhov tseem ceeb, thawb cov ciam teb ntawm metallurgy, polymer science, thiab kev tsim kho qhov chaw.

Yog xav paub ntxiv txog vim li cas cov khoom siv ntawm CO2 ultra-high purity roj siab txo valve tseem ceeb heev, koj tuaj yeem mus ntsib Jewellok ntawm https://www.jewellok.com/ yog xav paub ntau info.