

Ultra High Purity Gas Delivery Systems And Liquid Chemical Delivery Systems JW-300-LDS
Technical Data
| Model | JW-300-LDS |
| Special gas cabinet size | W1900*D800*H2100 |
| Control cabinet power supply | Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW |
| Purge | PN2,1/4”MVCR |
| High pressure holding | GN2.1/4” MVCR |
| Vacuum | 1/2” MVCR |
| VENT drain pipe | CDA driver, 1/4″ SWG |
| Pneumatic air source | OD 150MM, silane 810m³/hr; others 204m³/hr |
| Cabinet ventilation | OD 150MM, silane 810m³/hr; others 204m³/hr |
| Standard equipment | Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm |
| Operation interface | 10″ color touch screen |
Optional
*UV/IR Flame Detector
*Cylinder heating
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch
*Smoke Sensor Switch








