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Ultra High Purity Gas Delivery Systems And Liquid Chemical Delivery Systems JW-300-LDS

Category:

Technical Data

Model JW-300-LDS
Specification W1900*D800*H2100
Special gas cabinet size Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Control cabinet power supply PN2,1/4”MVCR
Purge PN2,1/4”MVCR
High pressure holding GN2.1/4” MVCR
Vacuum 1/2” MVCR
VENT drain pipe CDA driver, 1/4″ SWG
Pneumatic air source OD 150MM, silane 810m³/hr; others 204m³/hr
Cabinet ventilation OD 150MM, silane 810m³/hr; others 204m³/hr
Standard equipment Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
Operation interface 10″ color touch screen

Optional
*UV/IR Flame Detector
*Cylinder heating
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch
*Smoke Sensor Switch