Semi-Automatic VMB Gas Cabinet With Semiconductor Valve Manifold Box Diaphragm Valves And Gas Pressure Regulators

Semi-Automatic VMB Gas Cabinet With Semiconductor Valve Manifold Box Diaphragm Valves And Gas Pressure Regulators

In semiconductor manufacturing, handling hazardous gases safely and delivering them precisely is essential. The semi-automatic VMB gas cabinet is a key system designed to meet these needs. VMB stands for Valve Manifold Box, and this cabinet combines advanced components like diaphragm valves and gas pressure regulators to ensure safety, purity, and control in gas distribution.

What is a Gas Cabinet?
A gas cabinet is a secure enclosure that stores gas cylinders used in semiconductor processes, such as etching or chemical vapor deposition. It protects workers and equipment from leaks or accidents. The semi-automatic feature means some tasks, like adjusting gas flow or pressure, are automated, while others, like changing cylinders, require manual effort. This mix improves efficiency without sacrificing safety.

The Semiconductor Valve Manifold Box
The valve manifold box is the core of the system. Built specifically for semiconductor applications, it houses multiple valves to direct gas from cylinders to where it’s needed. It allows operators to switch gases or isolate parts of the system for maintenance, all while keeping gas flow precise and uncontaminated.

Role of Diaphragm Valves
Diaphragm valves are special because they use a flexible diaphragm to control gas flow. They create a tight seal, preventing leaks and keeping out contaminants. This is vital in semiconductor manufacturing, where even tiny particles can ruin a product. Their design also avoids generating debris, maintaining a clean environment.

Importance of Gas Pressure Regulators
Gas pressure regulators control the pressure of gas as it moves through the system. Different processes need specific pressures, and regulators ensure consistency. This precision helps produce reliable, high-quality semiconductor devices.

Why It Matters
Together, these components make the semi-automatic VMB gas cabinet a critical tool. It delivers pure, accurately pressured gas safely, supporting the production of advanced technology we rely on daily.

Technical Data