316L Vim Var Stainless Steel Ultra High Purity Gas Pressure Reducing Valve For Corrosive Specialty Gas Distribution

316L Vim Var Stainless Steel Ultra High Purity Gas Pressure Reducing Valve For Corrosive Specialty Gas Distribution

Product Overview and Purpose
The Jewellok 316L VIM VAR Stainless Steel Ultra High Purity Gas Pressure Reducing Valve is a precision engineered regulator designed to reduce high cylinder pressures to safe, operational levels. This specialized component is built specifically to control aggressive, toxic, and corrosive specialty gases—such as Hydrogen Chloride, Chlorine, and Ammonia—used in semiconductor fabrication and advanced solar cell manufacturing lines.

 

Core Technical Features

• VIM VAR Metallurgy: Forged from double melted stainless steel, this premium material completely eliminates non metallic inclusions. It ensures maximum resistance to chemical corrosion and prevents hydrogen embrittlement under intense process conditions.
• Electropolished Surface: The internal wetted paths undergo advanced electropolishing to achieve an ultra smooth finish under 5 micro inches Ra. This mirror finish eliminates microscopic pockets where moisture can hide, preventing outgassing and accelerating system purging cycles.
• Tied Diaphragm Safety: Features a robust tied diaphragm design that mechanically links the metal diaphragm to the internal poppet. This mechanism forces a positive shut off if corrosive salts or particles cause the valve to stick, preventing dangerous downstream over pressurization.
• Hermetic Isolation: Utilizes metal to metal body seals to maintain helium leak integrity rates under 1×10-9 atm cc per second, keeping atmospheric moisture and oxygen out of the clean chemical stream.

 

Installation and Operational Guidelines
To maintain system purity, unpack the double sealed regulator exclusively inside a certified cleanroom environment. Mount the valve using the standard integrated VCR face seal connections, ensuring new metal gaskets are used to achieve a leak proof joint. Before introducing toxic or corrosive media, perform a comprehensive nitrogen purge cycle to eliminate all ambient moisture. Maintain a consistent inspection schedule to monitor pressure stability and maximize system uptime.

 

JR1000 Series
Single Stage Regulator
Low to intermediate flow

Features

■ Body material: SS 316L, SS 316L VAR.
■ Metal to metal diaphragm sealing.
■ Internal electrolytic polishing, with a smoothness of up to Ra 5 μin.
■ The internal volume is small.
■ The import pressure can reach 3500psig.
■ Flow coefficient Cv: 0.09 and 0.15.
■ Maximum flow rate, standard: 30 SLPM, high flow HF: 120 SLPM.
■ High cleanliness assembly and packaging are suitable for the the high-purity semiconductor industry.
■ Every product undergoes helium testing before leaving the factory.

Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.

 

Flow curve

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.