Ultra-High Purity CDS and CDM Chemical Delivery and Dilution for Semiconductor Manufacturing
Ultra-High Purity CDS and CDM Chemical Delivery and Dilution for Semiconductor Manufacturing
Shenzhen Jewellok Technology Co., Ltd. provides advanced ultra-high purity (UHP) chemical handling solutions, including chemical delivery module (CDM) and chemical delivery system (CDS). Jewellok’s CDS and CDM automate high-purity chemical handling. Use the CDS for bulk transport from storage to the facility via electropolished 316L piping. Use the CDM for precise blending and dilution at the point-of-use. Both systems ensure safety and purity through automated leak detection and non-contact level monitoring.
Technical Data
| Model | JW-200L-CDM,JW-1000L-CDM |
| Special gas cabinet size | W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums) |
| Control cabinet power supply | 220VAC, 50HZ, 0.5～3KW, leakage protection |
| Purge | PN2,SS316 1/2″SWG |
| Ultra-pure water | UPW, JIS 16A bonding |
| Compressed air | CDA,SS316 1/2″SWG |
| Waste outlet | Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket |
| Standard equipment | PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional |
*Emergency manual operation panel
*High efficiency filter
*Door sensor
Ultra-High Purity (UHP) Chemical Delivery Systems (CDS) and Chemical Delivery/Dilution Modules (CDM) are the backbone of modern semiconductor fabrication. These systems ensure that volatile, high-purity chemicals reach the production line without contamination.
The CDS acts as the primary infrastructure. Built from electropolished 316L stainless steel, it transports bulk chemicals from storage to the facility. Its main goal is maintaining a continuous, bubble-free flow. By using non-contact level measurement and automated leak detection, the CDS reduces production downtime and prevents hazardous exposure, making it essential for large-scale operations.
The CDM provides the precision required at the point-of-use. It specializes in automated blending, mixing bulk chemicals with Deionized (DI) water according to strict recipes. This module replaces manual handling, ensuring exact concentration ratios through precision control valves. This automation is critical for delicate processes like etching and wafer cleaning, where even a minor chemical imbalance can ruin a batch.
Together, these systems provide a “bulk-to-tool” solution. They prioritize safety through automated changeovers and purity through high-grade filtration. For manufacturers, implementing Jewellok’s CDS and CDM technology means lower particle counts, increased safety, and significantly more reliable production cycles.
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