VMB Valve Manifold Box And Panel Gas Cabinet, BSGS Gas Cabinets, TMA Gas Cabinets, Scrubber Tail Gas Treatment Cabinets

VMB Valve Manifold Box And Panel Gas Cabinet, BSGS Gas Cabinets, TMA Gas Cabinets, Scrubber Tail Gas Treatment Cabinets

Valve Manifold Boxes (VMBs) and Panels (VMPs) are critical components in high-purity gas delivery systems, designed for safe and efficient gas distribution in industries like semiconductors and pharmaceuticals. VMBs split a single gas source into multiple outlets, typically supporting 4 to 8 sticks, with features like vent/purge and vacuum generators for safe maintenance of hazardous gases. They come in cabinet (for hazardous gases) or panel (for inert gases) configurations, offering manual to fully automated control with safety features like UV/IR sensors, toxic gas monitors, and emergency shut-off valves. These systems ensure precise gas flow, minimal downtime, and compliance with safety standards.

Bulk Specialty Gas Systems (BSGS) Gas Cabinets are designed for high-flow gas delivery, supporting large-scale applications. They accommodate 1–3 cylinders, with automated pressure regulation, purge systems, and PLC controls for reliable operation. BSGS cabinets are built for ultra-high-purity gases, featuring orbital-welded panels and safety interlocks, making them ideal for semiconductor manufacturing.

TMA (Trimethylaluminum) Gas Cabinets are specialized for handling highly reactive and pyrophoric gases like TMA, used in processes such as atomic layer deposition. These cabinets include robust safety features like fire sprinklers, leak detection, and exhaust systems to manage toxic risks, ensuring operator safety and system integrity.

Scrubber Tail Gas Treatment Cabinets treat exhaust gases from manufacturing processes, neutralizing hazardous byproducts before release. Equipped with advanced filtration and chemical scrubbing, they ensure environmental compliance by reducing emissions of toxic or corrosive gases. These systems are vital for sustainable operations in high-tech industries.

Together, these systems provide safe, reliable, and efficient gas management for advanced manufacturing.

Technical Data

Jewellok specializes in fully automatic and semi-automatic GC gas cabinets, BSGS gas cabinets, VMB gas cabinets, TMA gas cabinets, Scrubber tail gas treatment cabinets, gas distribution cabinets, VDB gas cabinets, and VDP gas cabinets, suitable for gases such as SiH4, NF3, NH3, N2O, and HCI.

Model	JW-200-VMB, JW-100-VMB
Specification	4S/6S/8S
Special gas cabinet size	W870D340H1680
Control cabinet power supply	Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Purge	PN2,1/4”MVCR
Vacuum	GN2.1/4” MVCR
VENT drain pipe	1/2” MVCR
Pneumatic air source	CDA driver, 1/4″ SWG
Cabinet ventilation	OD 100MM,70m3/hr
Standard equipment	Explosion-proof and anti-separation cabinet, explosion-proof self-locking door, explosion-proof glass observation window, remote cut-off
Operation interface	7″ color touch screen