Mastering the Hydride: Ultra-High Vacuum Regulators for PH3 in Semiconductor Manufacturing and MOCVD
Mastering the Hydride: Ultra-High Vacuum Regulators for PH3 in Semiconductor Manufacturing and MOCVD Abstract The precision delivery of Phosphine (PH3) is one of the most demanding challenges in gas panel design. As a highly toxic, pyrophoric, and chemically reactive hydride,…