


Premium Grade Ultra High Purity Gas Valve Solutions Sourced Directly from China for Critical Semiconductor and Advanced Photovoltaic Gas Distribution Lines
Premium Grade Ultra High Purity Gas Valve Solutions Sourced Directly from China for Critical Semiconductor and Advanced Photovoltaic Gas Distribution Lines
- Premium Metallurgy: Valves are forged from double melted 316L VIM VAR stainless steel, a material that eliminates non metallic inclusions to ensure maximum chemical resistance and zero system outgassing.
- Surface Topology: Internal wetted paths undergo advanced electropolishing to achieve an ultra smooth surface roughness average of less than 5 micro inches Ra. This mirror finish prevents microscopic particle entrapment and ensures rapid gas purging cycles.
- Hermetic Sealing: Utilizing high strength metal to metal diaphragm seals, these valves achieve helium leak integrity rates under 1×10-9 atm cc per second, blocking ambient oxygen and moisture from entering the process lines.
- Yield Protection: Total isolation of toxic, corrosive, and pyrophoric gases like Silane or Ammonia safeguards sensitive wafer and cell substrates during chemical vapor deposition and atomic layer etching.
- System Integration: These valves feature standard VCR face seal connections, making them highly compatible with automated Valve Manifold Boxes (VMB) and Gas Cabinets.
- Cost Efficiency: Direct sourcing from China allows high tech enterprises to optimize procurement budgets while securing robust, cleanroom certified hardware designed for continuous twenty four seven operation.
JR1000 Series
Single Stage Regulator
Low to intermediate flow
Features
■ Body material: SS 316L, SS 316L VAR.
■ Metal to metal diaphragm sealing.
■ Internal electrolytic polishing, with a smoothness of up to Ra 5 μin.
■ The internal volume is small.
■ The import pressure can reach 3500psig.
■ Flow coefficient Cv: 0.09 and 0.15.
■ Maximum flow rate, standard: 30 SLPM, high flow HF: 120 SLPM.
■ High cleanliness assembly and packaging are suitable for the the high-purity semiconductor industry.
■ Every product undergoes helium testing before leaving the factory.
Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.


Flow curve

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.




