Gasschränke für Bulk Specialty Gas Systems (BSGS) und Wäscher-Abgasreinigungsschränke für die Bereitstellung von hochreinen Spezialgasen in Großmengen

Gasschränke für Bulk Specialty Gas Systems (BSGS) und Wäscher-Abgasreinigungsschränke für die Bereitstellung von hochreinen Spezialgasen in Großmengen

Jewellok ist spezialisiert auf vollautomatische und halbautomatische GC-Gasschränke, BSGS-Gasschränke, VMB-Gasschränke, TMA-Gasschränke, Scrubber-Abgasreinigungsschränke, Gasverteilungsschränke, VDB-Gasschränke und VDP-Gasschränke, die für Gase wie SiH4, NF3, NH3, N2O und HCl geeignet sind.

Bulk Specialty Gas Systems (BSGS) are critical for delivering high-purity specialty gases in industries like semiconductor manufacturing, pharmaceuticals, and chemical processing. These systems ensure safe, efficient, and contamination-free gas delivery through specialized gas cabinets and scrubber tail gas treatment cabinets.

Gas Cabinets in BSGS
Gas cabinets are engineered enclosures designed to store and deliver high-purity specialty gases, such as silane, ammonia, or hydrogen chloride, used in sensitive processes. They feature robust safety mechanisms, including automated shut-off valves, leak detection sensors, and ventilation systems to mitigate risks associated with hazardous gases. The cabinets maintain gas purity by using high-grade materials like stainless steel and advanced filtration systems to prevent contamination. Automated control systems monitor pressure, flow, and purity levels, ensuring consistent delivery to the point of use. Regular maintenance and compliance with safety standards, such as SEMI S2, are essential to prevent leaks and ensure operational reliability.

Scrubber Tail Gas Treatment Cabinets
Scrubber tail gas treatment cabinets are integral for managing exhaust gases from BSGS. These systems neutralize and remove toxic, corrosive, or environmentally harmful byproducts before release. Wet scrubbers use liquid solutions to capture and neutralize acidic or reactive gases, while dry scrubbers employ chemical media to adsorb or react with hazardous compounds. Advanced designs incorporate real-time monitoring to optimize efficiency and ensure compliance with environmental regulations, such as EPA standards. These cabinets reduce emissions, protect equipment, and safeguard personnel and the environment.

BSGS gas cabinets and scrubber tail gas treatment cabinets work together to deliver high-purity gases safely and sustainably. Their advanced design and monitoring capabilities ensure operational efficiency, safety, and environmental compliance in high-stakes industrial applications.

Technische Daten

Optional
*UV/IR-Flammendetektor
*Cylinder Shutboy
Flächenheizung
*Ethernet-Kommunikationsmodul
*Personenwaage
*Strömungswächter