Integration eines Moduls zur Chemikalienzufuhr (CDM) für ultrahohe Reinheit und eines Ventilverteilerkastens zur Verbesserung der Halbleiterausbeute

Integration eines Moduls zur Chemikalienzufuhr (CDM) für ultrahohe Reinheit und eines Ventilverteilerkastens zur Verbesserung der Halbleiterausbeute

In the competitive world of semiconductor fabrication, maximizing wafer yield depends on the seamless integration of an Ultra-High Purity (UHP) Chemical Delivery Module (CDM) and a Valve Manifold Box (VMB). This combination creates a “smart circulatory system” that ensures process chemicals reach production tools without a single atom of contamination.

The CDM acts as the precision engine, using PLC-controlled automation to blend concentrated etchants and slurries into exact “recipes” with parts-per-trillion (ppt) purity. Once prepared, the fluid is passed to the VMB, which serves as the distribution hub. By using modular manifold designs and 316L electropolished stainless steel, the VMB can safely route chemicals to multiple production tools simultaneously.

This integration is a game-changer for facility uptime. Because the VMB allows for tool-specific isolation, technicians can perform maintenance on one production line without shutting down the entire factory. This modularity, combined with the CDM’s real-time monitoring and leak detection, significantly reduces the risk of “killer defects” on silicon wafers. By maintaining a constant, ultra-clean flow of process fluids, the CDM-VMB partnership allows fabs to achieve up to 99.9% operational uptime and superior chip reliability.

Technische Daten

Optional
*UV/IR-Flammendetektor
*Cylinder heating
Flächenheizung
*Ethernet-Kommunikationsmodul
*Personenwaage
*Strömungswächter
*Smoke Sensor Switch

Application:
Halbleiter
Photovoltaik
Solarenergie
Flüssigkristallbildschirm
Glasfaser
Andere Produktionsbereiche

Spezialchemikalien gehandhabt
HF – Flusssäure
HCl – Salzsäure
H2O2 – Wasserstoffperoxid
KOH – Kaliumhydroxid
HNO3 – Salpetersäure
NH4OH – Ammoniumhydroxid
H2SO4 – Schwefelsäure

Funktion:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering