316L Stainless Steel Semiconductor High Purity High Pressure Pneumatic Diaphragm Valve For Laboratory Specialty Gases

316L Stainless Steel Semiconductor High Purity High Pressure Pneumatic Diaphragm Valve For Laboratory Specialty Gases

Product Application and Purpose
The 316L Stainless Steel Semiconductor High Purity High Pressure Pneumatic Diaphragm Valve provides automated flow control and isolation for critical laboratory gas infrastructure. This specialized valve is engineered to safely manage high-pressure specialty gases—including flammable, toxic, and inert media—used in research institutes, analytical sampling systems, and gas chromatography laboratories. By incorporating a pneumatic actuator, the valve allows for precise remote operation and seamless integration into facility safety interlocks.

 

Core Technical Features

• High-Pressure Metallurgy: Forged from high-grade 316L stainless steel, the valve body delivers the exceptional tensile strength required to safely handle operating pressures up to 3,000 psig.
• High-Purity Surface Finish: The internal wetted pathways undergo precision finishing to achieve a smooth roughness average (Ra) of 10 micro-inches or less. This finish minimizes particle generation and prevents trace moisture entrapment.
• Hermetic Diaphragm Seal: Utilizing a high-endurance metal-to-metal diaphragm design, the valve eliminates soft elastomeric seals that degrade over time. It achieves helium leak integrity rates under 1×10-9 atm cc per second, keeping atmospheric contaminants out of the pure gas stream.
• Pneumatic Automation: Available in Normally Closed or Normally Open configurations, the rugged pneumatic actuator requires standard instrument air to execute swift, spark-free opening and closing cycles in hazardous lab environments.

 

Installation and Safety Guidelines
Handle the valve inside a clean environment to prevent contamination. Mount the unit onto the line using the integrated VCR face-seal or tube butt-weld connections, ensuring fresh gaskets are installed for a leak-tight joint. Connect the actuation air line to a clean, dry air source regulated to the specified pilot pressure. Prior to introducing active specialty gases, execute a comprehensive helium leak check and dry nitrogen purge sequence to ensure total system integrity.

 

HD SERIES

HIGH PRESSURE PNEUMATIC DIAPHRAGM VALVE

Features
Body
*316L VIM-VAR stainless steel body material for ultrahigh-purity applications.
*The inner surface roughness can reach Ra 5 μin, and the flow channel can be completely cleaned.
1.minimizes entrapment areas.
2.facilitates purging.
3.maximizes flow capacity.

Diaphragm
*Hastelloy C-22 or cobalt-based superalloys (UNS R30003) material for strength and corrosion resistance.
*Optimal design for long cycle life.

Seat
*Fully contained PCTFE seat design provides:
1.excellent resistance to swelling and contamination.
2.improved helium leak test performance.
3.minimal particle generation.
4.long cycle life.
*High cleanliness assembly and packaging are are suitable for the high-purity semiconductor industry.
*Every product undergoes helium testing before leaving the factory.

Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.