316L Vim Var Stainless Steel Ultra High Purity Diaphragm Valve Options For Semiconductor Gas Distribution Systems

316L Vim Var Stainless Steel Ultra High Purity Diaphragm Valve Options For Semiconductor Gas Distribution Systems

Product Application and Purpose
The Jewellok 316L VIM VAR Stainless Steel Ultra High Purity Diaphragm Valve series offers premier fluid isolation options for semiconductor gas distribution networks. These high performance valves are specifically engineered to control the flow of hazardous, flammable, and corrosive specialty gases within cleanroom environments. They serve as critical components in automated Valve Manifold Boxes, specialty Gas Cabinets, and point of use tool hookups where zero contamination is an absolute requirement.

 

Core Technical Engineering

• VIM VAR Metallurgy: Forged from double vacuum melted stainless steel, the valve bodies completely eliminate non metallic inclusions. This premium material ensures robust resistance to chemical corrosion and prevents hydrogen embrittlement under intense process conditions.
• Electropolished Wetted Paths: The internal flow channels undergo advanced electropolishing to achieve an ultra smooth finish under 5 micro inches Ra. This mirror finish eliminates microscopic pockets, preventing particle entrapment and ensuring rapid gas purging cycles.
• Hermetic Diaphragm Sealing: Utilizing a high endurance alloy metal to metal diaphragm seal, these valves completely remove the need for soft elastomers. They achieve helium mass spectrometer leak rates under 1×10-9 atm cc per second, blocking atmospheric oxygen and moisture.
• Zero Dead Volume: The optimized internal architecture prevents virtual leaks and fluid stagnation, safeguarding sensitive sub micron wafer yields from trace impurities.

 

Installation and Safety Protocols
To preserve system cleanliness, handle the double bagged valve exclusively inside a certified cleanroom. Align the valve body according to the directional flow arrow and connect using integrated VCR face seal fittings with pristine metal gaskets. Perform a complete helium leak test and a comprehensive nitrogen purge cycle before introducing toxic or pyrophoric media. Maintain regular inspection intervals to ensure optimal pneumatic or manual actuation performance.

 

LD SERIES

LOW PRESSURE MANUAL DIAPHRAGM VALVE

Features
Body
*316L VIM-VAR stainless steel body material for ultrahigh-purity applications.
*The inner surface roughness can reach Ra 5 μin, and the flow channel can be completely cleaned.
1.minimizes entrapment areas.
2.facilitates purging.
3.maximizes flow capacity.

Diaphragm
*Hastelloy C-22 or cobalt-based superalloys (UNS R30003) material for strength and corrosion resistance.
*Optimal design for long cycle life.

Seat
*Fully contained PCTFE seat design provides:
1.excellent resistance to swelling and contamination.
2.improved helium leak test performance.
3.minimal particle generation.
4.long cycle life.
*High cleanliness assembly and packaging are suitable for the high-purity semiconductor industry.
*Every product undergoes helium testing before leaving the factory.

Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.

Flow Channel Form

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.