Liquid Chemical Valve Manifold Box Chemical Dispensing Units, Semi & Fully Automatic Chemical Filling Equipment
Liquid Chemical Valve Manifold Box Chemical Dispensing Units, Semi & Fully Automatic Chemical Filling Equipment
In semiconductor and high-tech manufacturing, the precise distribution of hazardous and high-purity chemicals is managed through a specialized hierarchy of equipment. This includes Valve Manifold Boxes (VMB), Chemical Dispensing Units (CDU), and specialized Filling Equipment, all working together to ensure a safe, contamination-free environment.
Valve Manifold Boxes (VMB)
The VMB acts as the central traffic controller for chemical distribution. It takes a single supply line from a bulk source and splits it into multiple branches to feed various process tools. Typically constructed from 316L stainless steel or high-purity plastics, VMBs are equipped with manual or pneumatic valves, pressure transducers, and nitrogen purge ports. This allows maintenance on a single production tool without shutting down the entire facility’s chemical supply.
Chemical Dispensing Units (CDU)
The CDU is the “point-of-use” brain of the system. While a VMB simply directs flow, a CDU actively manages it. These units often include high-precision pumps, filtration systems, and flow meters to dispense exact volumes of chemicals. They are essential for applications requiring precise recipe control, such as photoresist coating or wafer cleaning. By automating the dispense cycle, CDUs eliminate the variability and safety risks associated with manual handling.
Semi & Fully Automatic Chemical Filling Equipment
Filling systems are used to safely transfer chemicals from bulk transport containers into the facility’s internal supply tanks.
- Semi-Automatic: Requires an operator to initiate the connection and monitor the process, but the system handles the actual liquid transfer and level shut-off.
- Fully Automatic: Features robotic or advanced sensor-driven interfaces that handle the entire cycle—from drum identification and vacuum-leak testing to nitrogen blanketing and final disconnection.
Together, these components create a robust Automatic Liquid Supply infrastructure. They prioritize operator safety through leak detection and secondary containment while ensuring the ultra-high purity required for advanced manufacturing.
Technical Data
| Model | JW-200L-CDM,JW-1000L-CDM |
| Special gas cabinet size | W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums) |
| Control cabinet power supply | 220VAC, 50HZ, 0.5～3KW, leakage protection |
| Purge | PN2,SS316 1/2″SWG |
| Ultra-pure water | UPW, JIS 16A bonding |
| Compressed air | CDA,SS316 1/2″SWG |
| Waste outlet | Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket |
| Standard equipment | PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional |
*Emergency manual operation panel
*High efficiency filter
*Door sensor
Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid
CDM and CDS Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields
Function Of CDM and CDS:
Chemical filtration
Chemical sampling
Chemical circulation
Chemical delivering
Shenzhen Jewellok Technology Co., Ltd. provides advanced ultra-high purity (UHP) chemical handling solutions, including chemical delivery module (CDM) and chemical delivery system (CDS). Jewellok’s CDS and CDM automate high-purity chemical handling. Use the CDS for bulk transport from storage to the facility via electropolished 316L piping. Use the CDM for precise blending and dilution at the point-of-use. Both systems ensure safety and purity through automated leak detection and non-contact level monitoring.
These instructions outline the standard operation for Jewellok’s Chemical Delivery Systems (CDS) and Delivery Modules (CDM) to ensure safety and ultra-high purity (UHP) standards.
1. Bulk Supply and Delivery (CDS)
The CDS manages the automated transport of bulk chemicals from storage to the facility. Operators must monitor the non-contact level sensors via the HMI panel to track real-time consumption. The system utilizes automated changeover protocols; when a supply barrel is empty, the system will switch sources to maintain a bubble-free flow. Ensure all 316L electropolished piping connections are inspected during scheduled maintenance to prevent particle contamination.
The CDS manages the automated transport of bulk chemicals from storage to the facility. Operators must monitor the non-contact level sensors via the HMI panel to track real-time consumption. The system utilizes automated changeover protocols; when a supply barrel is empty, the system will switch sources to maintain a bubble-free flow. Ensure all 316L electropolished piping connections are inspected during scheduled maintenance to prevent particle contamination.
2. Mixing and Dispensing (CDM & VMB)
The CDM handles precise blending and dilution at the point-of-use. Users must select the pre-programmed recipe control to automate the mixing of chemicals with DI water. Use the Valve Manifold Box (VMB) to isolate specific branch lines when servicing individual tools without halting the entire facility supply.
The CDM handles precise blending and dilution at the point-of-use. Users must select the pre-programmed recipe control to automate the mixing of chemicals with DI water. Use the Valve Manifold Box (VMB) to isolate specific branch lines when servicing individual tools without halting the entire facility supply.
3. Safety and Waste Protocols
All units feature automatic leak detection and secondary containment. If an alarm sounds, the system will automatically trigger a safety shut-off. For organic solvents, ensure nitrogen blanketing is active to prevent oxidation and fire hazards.
All units feature automatic leak detection and secondary containment. If an alarm sounds, the system will automatically trigger a safety shut-off. For organic solvents, ensure nitrogen blanketing is active to prevent oxidation and fire hazards.
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