Ultra High Purity Liquid Chemical Delivery System And Bulk Chemical Delivery Handling System For Semiconductor Cleanrooms

Ultra High Purity Liquid Chemical Delivery System And Bulk Chemical Delivery Handling System For Semiconductor Cleanrooms

In the high-stakes environment of semiconductor fabrication, Ultra-High Purity (UHP) liquid chemical delivery systems are essential for maintaining wafer yield. These systems provide a seamless, automated link between bulk chemical storage and the sensitive tools inside the cleanroom.

The Bulk Chemical Delivery Handling System serves as the facility’s primary infrastructure. It is engineered to transport large volumes of acids, bases, and solvents from external tank farms or global drum rooms. To prevent contamination, these systems utilize electropolished 316L stainless steel or high-grade PFA piping. By implementing automated pressure-transfer or mag-drive pumping, the system ensures a steady, pulse-free flow while minimizing the risk of chemical crystallization or particle generation.

The UHP Liquid Chemical Delivery System focuses on the “final mile” of distribution. It incorporates advanced filtration and non-contact level sensors to monitor chemical consumption in real-time. Safety is paramount; these systems feature secondary containment, automated leak detection, and nitrogen blanketing to prevent oxidation. By automating the supply, manufacturers eliminate manual handling errors, drastically improving operator safety and ensuring that only the purest chemicals reach the production line.

Technical Data

Model	JW-200L-CDM,JW-1000L-CDM
Special gas cabinet size	W2200D1500H2000(double drums)/W2990D2100H2000(double drums)
Control cabinet power supply	220VAC, 50HZ, 0.5～3KW, leakage protection
Purge	PN2,SS316 1/2″SWG
Ultra-pure water	UPW, JIS 16A bonding
Compressed air	CDA,SS316 1/2″SWG
Waste outlet	Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket
Standard equipment	PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional

*Emergency manual operation panel
*High efficiency filter
*Door sensor

Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields

Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid

Function:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering

chemical delivery module (CDM) and chemical delivery system (CDS)

Fluid Chemical Delivery Module And Chemical Delivery System

Chemical automatic liquid supply equipment

Shenzhen Jewellok Technology Co., Ltd. provides advanced ultra-high purity (UHP) chemical handling solutions, including chemical delivery module (CDM) and chemical delivery system (CDS). Jewellok’s CDS and CDM automate high-purity chemical handling. Use the CDS for bulk transport from storage to the facility via electropolished 316L piping. Use the CDM for precise blending and dilution at the point-of-use. Both systems ensure safety and purity through automated leak detection and non-contact level monitoring.

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