Liquid Chemical Delivery Module And Chemical Delivery System Semiconductor Chemical Automatic Liquid Supply Equipment
Liquid Chemical Delivery Module And Chemical Delivery System Semiconductor Chemical Automatic Liquid Supply Equipment
Shenzhen Jewellok Technology Co., Ltd. provides advanced ultra-high purity (UHP) chemical handling solutions, including chemical delivery module (CDM) and chemical delivery system (CDS). Jewellok’s CDS and CDM automate high-purity chemical handling. Use the CDS for bulk transport from storage to the facility via electropolished 316L piping. Use the CDM for precise blending and dilution at the point-of-use. Both systems ensure safety and purity through automated leak detection and non-contact level monitoring.
Technical Data
| Model | JW-200L-CDM,JW-1000L-CDM |
| Special gas cabinet size | W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums) |
| Control cabinet power supply | 220VAC, 50HZ, 0.5～3KW, leakage protection |
| Purge | PN2,SS316 1/2″SWG |
| Ultra-pure water | UPW, JIS 16A bonding |
| Compressed air | CDA,SS316 1/2″SWG |
| Waste outlet | Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket |
| Standard equipment | PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional |
*Emergency manual operation panel
*High efficiency filter
*Door sensor
Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields
Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid
Function:
filtration
sampling
circulation
delivering
In the semiconductor industry, the precision of chemical handling directly impacts wafer yield and facility safety. Liquid Chemical Delivery Systems (CDS) and Chemical Delivery Modules (CDM) form an integrated, automatic supply chain designed to transport, blend, and monitor ultra-high purity (UHP) chemicals with zero contamination.
The Role of the Chemical Delivery System (CDS)
The CDS serves as the primary infrastructure for “Bulk Chemical Distribution.” It manages the movement of raw etchants, solvents, and developers from large-scale storage tanks to the production floor. To maintain the extreme purity required for sub-micron manufacturing, these systems are constructed using electropolished 316L stainless steel or high-grade fluoropolymers (like PFA).
Automated logic controllers manage the flow, utilizing nitrogen pressure or mag-drive pumps to ensure a steady, bubble-free supply. Safety is a core feature; the system includes real-time leak detection, fire suppression interfaces, and automated barrel changeovers, which minimize operator contact with hazardous materials and reduce production downtime by nearly 30%.
The Liquid Chemical Delivery Module (CDM)
While the CDS handles bulk transport, the CDM provides “Point-of-Use” (POU) precision. Often referred to as a dilution or blending module, the CDM automatically mixes concentrated chemicals with Deionized (DI) water or other additives based on specific process recipes.
Equipped with high-precision control valves and non-contact flow meters, the CDM ensures that the chemical concentration remains consistent across every batch. This level of automation is vital for processes like Wet Etching and Cleaning (WEC), where even a 1% deviation in concentration can damage sensitive circuitry.
Integration and Efficiency
By combining these systems into a single Automatic Liquid Supply Equipment suite, semiconductor fabs achieve a “closed-loop” environment. This integration ensures that chemicals remain in a controlled, ultra-clean state from the moment they enter the facility until they reach the wafer. The result is a highly reliable manufacturing process that prioritizes purity, repeatability, and environmental safety.
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